In microtechnology and science the chemical composition of laterally structured devices is of great importance. Although good quantitative techniques to probe the composition of the surface, like RBS, exist they are usually applied to study processes operative on blanket film samples which might not represent the processes operative on structured devices. In this work we investigate the physics of micro- and macrobeam RBS and PIXE for the study of structured samples at the microscale. We developed an RBS ensemble tomography methodology which enables true 3D characterization of high aspect ratio microstructures. We applied this methodology to determine the surface chemistry of trench like microstructures.

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