This short presentation gives an overview of the research on carried out at the Surrey Ion Beam Centre on using ion beams for Si-28 enrichment for fabrication of quantum computers.
- The first part is about direct Si-28 implantation on conventional implanters and its limitations. Surrey Ion Beam Centre's Danfysik implanter was used for this investigation.
- The second part shows results from combining conventional ion implantation with metal-induced layer exchange for Si-28 enrichment
- The final part discusses the benefits of using Surrey Ion Beam Centre's single ion implanter, SIMPLE, for enrichment research.
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