Fabrication of isotopically pure substrates for quantum computers using ion beams

This short presentation gives an overview of the research on carried out at the Surrey Ion Beam Centre on using ion beams for Si-28 enrichment for fabrication of quantum computers.

  1. The first part is about direct Si-28 implantation on conventional implanters and its limitations. Surrey Ion Beam Centre's Danfysik implanter was used for this investigation.
  2. The second part shows results from combining conventional ion implantation with metal-induced layer exchange for Si-28 enrichment
  3. The final part discusses the benefits of using Surrey Ion Beam Centre's single ion implanter, SIMPLE, for enrichment research.

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