Germanium ion implantation for trimming silicon photonic ring resonators

We use ion-implantation technology and localised laser annealing to precisely control the operating wavelength of silicon photonics optical filters for applications in the next generation data-communication systems. Susceptibility of Silicon Photonics devices to fabrication errors is well known, and leads to compensation via thermal tuning.  We report an alternative technique that removed the need for this thermal correction, and therefore removes the power requirement. This technology has led to two patent applications, ten invited talks (including a plenary and two keynotes talks) and two meetings that are industry focused.


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